05018048 is referenced by 80 patents and cites 63 patents.

A monolithic multi-layer capacitor is disclosed having a central capacitively active area and two electrode joining sections separated from the active area by sloped sections. The dielectric layers are about 1 micron thick in the active area and taper gradually to zero thickness in the sloped sections. Electrode layers in the active area have a thickness in the range from 200 to 500 Angstroms and sufficient thickness throughout the sloped sections for adequate current carrying capacity. Various acrylates are used for the dielectric layers, the number of layers ranging from a few to many thousands.

Apparatus and methods are disclosed for the fabrication of such capacitors on a high speed, production scale basis. Such employ techniques for the flash evaporation of highly reactive monomers of acrylate dielectric materials so as to form a gaseous stream of such materials. The gas stream is controllably directed to a deposition surface for condensation and subsequent curing by a field enhanced gas discharge electron beam source. The control of the dielectric gas stream is accomplished by means of adjacent gas streams of an inert gas directed to areas of the deposition surface where deposition of the electrode material is unwanted. Means are disclosed for the atomization of the monomers of the dielectric material in preparation for its flash evaporation.

Title
Miniaturized monolithic multi-layer capacitor and apparatus and method for making
Application Number
562779
Publication Number
5018048
Application Date
September 15, 1989
Publication Date
May 21, 1991
Inventor
Mooyoung Ham
Glens Falls
NY, US
Donald S Strycker
Glens Falls
NY, US
Angelo Yializis
South Glens Falls
NY, US
David G Shaw
Glens Falls
NY, US
Agent
Christie Parker & Hale
Assignee
Spectrum Control
AZ, US
IPC
H01G 7/00
H01G 4/08
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