05015850 is referenced by 69 patents and cites 8 patents.

A microfabricated microscope assembly including a piezoelectric bimorph cantilever arm mounted at one end to a first substrate. The free end of the canitlever arm has a tip mounted thereto for scanning a scanned surface mounted on a second substrate. The cantilever arm and the substrate are configured to carry out a predetermined write or read mode of operation, such as scanning tunneling microscopy or atomic force microscopy. The two substrates are spaced apart a fixed distance by spacer feet which project from one of the substrates and which have their ends fixed to ther surface of the other substrate by eutectic, aniodic, or adhesive bonding. An array of microfabricated microscope assemblies is formed using a plurality of individual assemblies. A number of different write/read modes of operation are accommodated, such as charge storage, molecular attachment, or magnetic domains. An array of piezoelectric cantilever arms having tips fixed to the free ends thereof and mounted to a substrate form are used to scan a scanned surface. The array is moved laterally with respect to the scanned surface using mechanical actuators as micropositioners for coarse positioning and using the piezoelectric cantilever arms for fine positioning.

Title
Microfabricated microscope assembly
Application Number
7/368664
Publication Number
5015850
Application Date
June 20, 1989
Publication Date
May 14, 1991
Inventor
Thomas R Albrecht
Stanford
CA, US
Mark J Zdeblick
Los Altos Hills
CA, US
Agent
Flehr Hohbach Test Albritton & Herbert
Assignee
The Board of Trustees of the Leland Stanford Junior University
CA, US
IPC
H01J 37/00
G01N 23/00
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