04993357 is referenced by 142 patents and cites 7 patents.

An apparatus for carrying out atomic layer epitaxial growth of a thin semiconductor layer on a substrate surface has a cylindrical chamber in which a substrate holder is coaxially mounted so as to define an annular gap therebetween. The substrate holder can be in the form of a rotatable turbine wheel and a funnel-shaped hood introduces a reactant gas onto the substrate at an oblique angle.

Title
Apparatus for atomic layer epitaxial growth
Application Number
7/287903
Publication Number
4993357
Application Date
December 21, 1989
Publication Date
February 19, 1991
Inventor
Christoph Scholz
Schliersee
DE
Agent
Flynn Thiel Boutell & Tanis
Assignee
CS Halbleiter und Solartechnologie
DE
IPC
C23C 16/00
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