04956619 is referenced by 560 patents and cites 16 patents.

A deflectable beam spatial light modulator formed from a structure of a reflecting layer, typically metal, on a spacer layer, typically photoresist, which in turn is on a substrate containing electronic addressing circuitry is disclosed. Also, the method of fabrication including a plasma etch after dicing of the substrate into chips is disclosed.

Title
Spatial light modulator
Application Number
636180
Publication Number
4956619
Application Date
October 28, 1988
Publication Date
September 11, 1990
Inventor
Larry J Hornbeck
Van Alstyne
TX, US
Agent
Carlton H Hoel
James T Comfort
Melvin Sharp
Assignee
Texas Instruments Incorporated
TX, US
IPC
C03C 15/00
B44C 1/22
G07F 1/29
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