04954142 is referenced by 171 patents and cites 10 patents.

Disclosed is a method of chem-mech polishing an electronic component substrate. The method includes the following steps;

Title
Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor
Application Number
7/285435
Publication Number
4954142
Application Date
March 7, 1989
Publication Date
September 4, 1990
Inventor
Anton Nenadic
Red Hook
NY, US
Robert W Pasco
Wappingers Falls
NY, US
Kenneth P Rodbell
Poughkeepsie
NY, US
William J Patrick
Newburgh
NY, US
Frank B Kaufman
Amawalk
NY, US
William L Guthrie
Hopewell Junction
NY, US
Lawrence D David
Wappingers Falls
NY, US
Jeffrey W Carr
Fishkill
NY, US
Agent
Ira D Blecker
Assignee
International Business Machines Corporation
NY, US
IPC
C09C 1/68
View Original Source