04951601 is referenced by 723 patents and cites 5 patents.

An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator, and also includes stations about the periphery of the load lock for connecting one, two or several vacuum process chambers to the load lock chamber. A robot is mounted within the load lock and utilizes a concentric shaft drive system connected to an end effector via a dual four-bar link mechanism for imparting selected R-.theta. movement to the blade to load and unload wafers at the external elevator, internal elevator and individual process chambers. The system is uniquely adapted for enabling various types of IC processing including etch, deposition, sputtering and rapid thermal annealing chambers, thereby providing the opportunity for multiple step, sequential processing using different processes.

Title
Multi-chamber integrated process system
Application Number
944803
Publication Number
4951601
Application Date
June 23, 1989
Publication Date
August 28, 1990
Inventor
Peter D Hoppe
Sunnyvale
CA, US
Isaac Harari
Mountain View
CA, US
Masato Toshima
San Jose
CA, US
David Cheng
San Jose
CA, US
David N Wang
Cupertino
CA, US
Sasson Somekh
Redwood City
CA, US
Dan Maydan
Los Altos Hills
CA, US
Agent
Philip A Dalton
Assignee
Applied Materials
CA, US
IPC
C23C 16/00
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