04950870 is referenced by 44 patents and cites 15 patents.

A heat-treating apparatus includes a process tube accommodating an object to be heat-treated therein, and a plurality of independent heaters including at least three heaters arranged at both end portions and the central portion of a side wall of the process tube, so as to surround the process tube and, the heating temperatures of the individual heaters being freely adjustable. In this heat-treating apparatus, no direct heat transfer is caused between the heaters, so that the heating temperature of the heater at each end portion of the process tube can be adjusted to a high value, without entailing such an uneven temperature distribution as is caused in the case of a conventional heat-treating apparatus. Thus, uniform temperature distribution can be attained in an area covering the same range for the conventional apparatus, even though the heaters at both end portions are reduced in length.

Title
Heat-treating apparatus
Application Number
7/273972
Publication Number
4950870
Application Date
November 21, 1988
Publication Date
August 21, 1990
Inventor
Wataru Ohkase
Sagamihara
JP
Seishiro Sato
Machida
JP
Hiroyuki Mitsuhashi
Machida
JP
Agent
Oblon Spivak McClelland Maier & Neustadt
Assignee
Tel Sagami
JP
IPC
H05B 3/64
View Original Source