04943538 is referenced by 177 patents and cites 15 patents.

An electrically programmable low impedance circuit element is disclosed having capacitor-like structure with very low leakage before programming and a low resistance after programming. The electrically programmable low impedance circuit element of the present invention includes a lower conductive electrode which may be formed of a metal or semiconductor material, an insulating layer, which, in a preferred embodiment includes a first layer of silicon dioxide, a second layer of silicon nitride and a third layer of silicon dioxide. An upper electrode formed of a metal or of a semiconductor material of the same conductivity type of the lower electrode or a sandwich of both completes the structure.

Title
Programmable low impedance anti-fuse element
Application Number
861519
Publication Number
4943538
Application Date
March 10, 1988
Publication Date
July 24, 1990
Inventor
John L McCullum
Saratoga
CA, US
Esmat Z Hamdy
Fremont
CA, US
Amr M Mohsen
Saratoga
CA, US
Agent
Lyon & Lyon
Assignee
Actel Corporation
CA, US
IPC
H01L 21/465
H01L 21/22
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