04933158 is referenced by 68 patents and cites 7 patents.

There is here disclosed a method for removing nitrous oxide (N.sub.2 O), carbon dioxide (CO.sub.2) and dinitrogen difluoride (N.sub.2 F.sub.2) from a nitrogen trifluoride gas. The present invention is directed to a method for purifying a nitrogen trifluoride gas which comprises the steps of thermally treating, at a temperature of 250.degree. to 700.degree. C., a zeolite selected from the group consisting of analcime, clinoptilolite, mordenite, ferrierite, phillipsite, chabazite, erionite and laumotite; forming a packed bed of the treated zeolite; and passing the nitrogen trifluoride gas containing the gaseous impurities at a temperature of -125.degree. to 50.degree. C. through the filler layer.

Title
Method for purifying nitrogen trifluoride gas
Application Number
7/425957
Publication Number
4933158
Application Date
October 24, 1989
Publication Date
June 12, 1990
Inventor
Naruyuki Iwanaga
Yamaguchi
JP
Makoto Aritsuka
Yamaguchi
JP
Agent
Fisher Christen & Sabol
Assignee
Mitsui Toatsu Chemicals Incorporated
JP
IPC
C01B 21/06
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