04918383 is referenced by 145 patents and cites 4 patents.

An apparatus [10] for providing an automatic lateral scrubbing motion when a test membrane [22] engages a device under test (DUT) (not shown). Included are a fixed length flexure pivot assembly [30] and a pair of variable length flexure pivot assemblies [38]. Signal traces, signal trace terminals, and contact bumps [23, 25, 60] are formed for communicating electrical signals between the apparatus [10] and the DUT. A membrane [22] is stretched and configured for carrying the signal traces, signal trace terminals, and contact bumps [23, 25 and 60]. A hexagonal translation stage [28] is formed with an upper surface [29] disposed for being coupled to at lesat one of the fixed and variable length flexure pivot assemblies [30 and 38], and formed with a lower surface [54]. Surface [54] is formed to define an aperture [51] through itself, formed for securing over itself the membrane [22] when stretched; it is disposed for being coupled to membrane [22]. Finally included is a carrier [12], formed for suspending the hexagonal translation stage [28] and fixed and variable length flexure pivot assemblies [30 and 38].

Title
Membrane probe with automatic contact scrub action
Application Number
162763
Publication Number
4918383
Application Date
September 28, 1988
Publication Date
April 17, 1990
Inventor
Miklos Perlaki
1406 Sage Rd., Colfax, 95713
CA, US
Richard E Huff
1408 Solana Dr., Belmont, 94002
CA, US
Agent
Edward Y Wong
Robert P Sabath
IPC
G01R 1/067
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