04917556 is referenced by 238 patents and cites 17 patents.

A modular wafer processing machine is provided which is based on interconnected handling units having wafer handling arms. Each unit can pass a wafer to another unit in the same vacuum environment to a processing module.

Title
Modular wafer transport and processing system
Application Number
856738
Publication Number
4917556
Application Date
May 26, 1989
Publication Date
April 17, 1990
Inventor
Frederick Turner
Sunnyvale
CA, US
Lawrence R Stark
San Jose
CA, US
Agent
Peter J Sgarbossa
Gerald M Fisher
Stanley Z Cole
Assignee
Varian Associates
CA, US
IPC
B65G 1/06
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