04902899 is referenced by 84 patents and cites 10 patents.

A lithographic process having improved image quality by employing a mask that includes a plurality of opaque elements or transparent elements that are smaller than the resolution of the lighography to be employed in order to control the transmittance of the actinic light exposure area.

Title
Lithographic process having improved image quality
Application Number
7/56161
Publication Number
4902899
Application Date
June 1, 1987
Publication Date
February 20, 1990
Inventor
Alan E Rosenbluth
Yorktown Heights
NY, US
Anne M Moruzzi
Wappingers Falls
NY, US
Burn J Lin
Scarsdale
NY, US
Agent
Pollock Vande Sande & Priddy
Assignee
International Business Machines Corporation
NY, US
IPC
G03F 7/20
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