04897171 is referenced by 59 patents and cites 30 patents.

A wafer susceptor is disclosed. The wafer susceptor has: a first conductive electrode which includes its flat surface covered with a thin insulating film; a second conductive electrode which is electrically insulated from the first conductive electrode and is disposed so that the surface thereof is flush with the surface of the thin insulating film which covers the first conductive electrode; a means for imparting a specified electric potential to the second conductive electrode; and a means for applying a predetermined voltage between the first conductive electrode and the second conductive electrode. With this constitution, the wafer susceptor is capable of adsorbing a wafer by an electrostatic force and of regulating an electric potential of the wafer to a predetermined value in time of the wafer being adsorbed.

Wafer susceptor
Application Number
Publication Number
Application Date
September 29, 1988
Publication Date
January 30, 1990
Tadahiro Ohmi
2-1-17-301, Komegabukuro, Sendai-shi, Miyagi-ken
Oblon Spivak McClelland Maier & Neustadt
C23F 1/02
B05C 11/14
View Original Source