04874631 is referenced by 12 patents and cites 7 patents.

A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.

Title
Multi-chamber deposition system
Application Number
877161
Publication Number
4874631
Application Date
February 16, 1988
Publication Date
October 17, 1989
Inventor
Roger K Westerberg
Cottage Grove
MN, US
Frank R Jeffrey
Shoreview
MN, US
Richard L Jacobson
Roseville
MN, US
Agent
Leland D Schultz
Walter N Kirn
Donald M Sell
Assignee
Minnesota Mining and Manufacturing Company
MN, US
IPC
C23C 16/00
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