04874499 is referenced by 311 patents and cites 5 patents.

Electrochemical microsensors formed of a substrate containing means for sensing potential or current, including active and passive electronic devices and electronic circuits, and a micromachined structure containing at least one cavity overlying the sensing means, wherein the structure and substrate are bonded together at a temperature less than about 400.degree. C., in the absence of high voltage fields, using means not requiring highly planarized surfaces. A wide variety of materials can be utilized for both the substrate and overlying structure.

Diverse embodiments are possible, having in common a cavity containing a chemically sensitive material and means for sensing potential or current.

The resulting structural organization of materials transduces a chemical signal, such as concentration, to an electrical signal, which is then "processed" by the underlying FET or metallic connections. The present invention resolves the problems of the prior art in combining sensing devices with chemically sensitive material(s) to form a functional microsensor in a conveniently manufacturable fashion.

Title
Electrochemical microsensors and method of making such sensors
Application Number
7/197561
Publication Number
4874499
Application Date
May 23, 1988
Publication Date
October 17, 1989
Inventor
Scott D Collins
Newton
MA, US
Rosemary L Smith
Newton
MA, US
Agent
Kilpatrick & Cody
Assignee
Massachusetts Institute of Technology
MA, US
IPC
G01N 27/30
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