04869301 is referenced by 26 patents and cites 10 patents.

The cylinder cabinet piping system of this invention has a system to supply a purge gas continuously to the main line, or to the main line and the branch line, thereby to prevent stagnation of gas in the purge gas line and to supply a super-high-purity gas to a process unit.

Title
Cylinder cabinet piping system
Application Number
7/194841
Publication Number
4869301
Application Date
May 17, 1988
Publication Date
September 26, 1989
Inventor
Masaru Umeda
Tokyo
JP
Fumio Nakahara
Sendai
JP
Kazuhiko Sugiyama
Sendai
JP
Tadahiro Ohmi
Sendai
JP
Agent
Anthony Niewyk
Albert L Jeffers
Assignee
Tadahiro OHMI
JP
IPC
B08B 9/00
View Original Source