A process is disclosed for producing a high density split gate nonvolatile memory cell which includes a floating gate and a control gate that is formed above the floating gate. The drain region is self-aligned to the floating gate and the source region is self-aligned to the control gate. Fully self-aligned implantation is made possible by the process and structure using self-aligned etch. Programming of the memory cell uses standard EPROM programming, and erasing is accomplished by Fowler-Nordheim tunneling or photoemission. The memory cell can be made with a reduced cell size and read current uniformity is obtained.