04853967 is referenced by 109 patents and cites 26 patents.

An image is taken of a circuit layer pattern containing circuit element representations and the areas of the circuit element representations within the image are modified. The modification includes at least one modification step which consists of thinning the circuit element representations to the point where at least some features of the circuit element representations are skeletonized, to thereby emphasize distinctive features of the circuit element representations. The emphasized distinctive features are compared with previously determined design criteria for distinctive features expected from the prior steps so that any lack of correspondence indicates a defect.

Title
Method for automatic optical inspection analysis of integrated circuits
Application Number
626552
Publication Number
4853967
Application Date
April 6, 1988
Publication Date
August 1, 1989
Inventor
Jon R Mandeville
Yorktown Heights
NY, US
Agent
Philip J Feig
Assignee
International Business Machines Corporation
NY, US
IPC
G06K 9/00
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