04838991 is referenced by 219 patents and cites 13 patents.

A conformal organic layer is used to define spacers on the sidewalls of an organic mandrel. The organic layer (e.g., parylene) can be deposited at low temperatures, and as such is compatible with temperature-sensitive mandrel materials that reflow at high deposition temperatures. The conformal organic material can be dry etched as the same rate as the organic mandrels, while being resistant to wet strip solvents that remove the organic mandrels. This series of etch characteristics make the organic mandrel-organic spacer combination compatible with a host of masking applications.

Title
Process for defining organic sidewall structures
Application Number
114960
Publication Number
4838991
Application Date
June 20, 1988
Publication Date
June 13, 1989
Inventor
Robert W Sweetser
Essex Junction
VT, US
Jeffrey A Robinson
Essex Junction
VT, US
Michael A Leach
Winooski
VT, US
Michael L Kerbaugh
Burlington
VT, US
Donald M Kenney
Shelburne
VT, US
William J Cote
Essex Junction
VT, US
Agent
Mark F Chadurjian
Assignee
International Business Machines Corporation
NY, US
IPC
C03C 25/06
C03C 15/00
B29C 37/00
B44C 1/22
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