04835005 is referenced by 65 patents and cites 50 patents.

A process for forming a deposition film on a substrate comprises introducing separately a precursor or activated species formed in a decomposition space (B) and activated species formed in a decomposition space (C), into the deposition space wherein the film is formed on the substrate.

Title
Process for forming deposition film
Application Number
641021
Publication Number
4835005
Application Date
February 22, 1988
Publication Date
May 30, 1989
Inventor
Isamu Shimizu
Yokohama
JP
Shunichi Ishihara
Ebina
JP
Kyosuke Ogawa
Tokyo
JP
Masaaki Hirooka
Toride
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaishi
JP
IPC
C23C 16/00
B05D 3/06
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