04804636 is referenced by 173 patents and cites 9 patents.

Disclosed is a process for making VLSI integrated circuits and a local interconnect system, wherein first poly, second poly and moat are all interconnected in any desired pattern by a TiN local interconnect. No masks are required beyond those which would be required for the two poly levels and local interconnect capability anyway.

Title
Process for making integrated circuits having titanium nitride triple interconnect
Application Number
729318
Publication Number
4804636
Application Date
March 7, 1986
Publication Date
February 14, 1989
Inventor
Thomas C Holloway
Dallas
TX, US
Roger A Haken
Richardson
TX, US
Robert Groover III
Dallas
TX, US
Agent
Melvin Sharp
Leo N Heiting
Rodney M Anderson
Assignee
Texas Instruments Incorporated
TX, US
IPC
H01L 21/283
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