04803947 is referenced by 29 patents and cites 4 patents.

There is disclosed an apparatus for forming deposited film which forms deposited film on a substrate by introducing a gaseous starting material for formation of deposited film and a gaseous oxidizing agent having the property of oxidation action for said gaseous starting material through separate routes respectively into a film forming space to thereby effect chemical contact therebetween, comprising one or two or more chambers for formation of deposited film and one or two or more etching chambers for etching at least one of said substrate and the deposited film formed on the substrate connected to one another.

Title
Apparatus for forming deposited film
Application Number
7/3053
Publication Number
4803947
Application Date
January 13, 1987
Publication Date
February 14, 1989
Inventor
Isamu Shimizu
Yokohama
JP
Junichi Hanna
Yokohama
JP
Masaaki Hirooka
Toride
JP
Masao Ueki
Chiba
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaisha
JP
IPC
C23C 16/00
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