04801801 is referenced by 1 patents and cites 4 patents.

A transmission-type electron microscope comprises a lens system including an electron gun for producing an electron beam that is focused and directed to a specimen. The lens system forms a magnified electron optical image of the specimen from the electron beam transmitted through the specimen. A two-dimensional sensor is mounted in the plane in which the magnified image is formed, the sensor acting to store the energy of the electron beam impinging on it and to release the stored energy as light when illuminated with light or heated. An electron beam-deflecting means is mounted in the lens system and acting to tilt the focal plane in which the magnified lens image is formed, in such a way that a straight line extending from the main optical axis of the electron beam between the electron gun and the specimen does not interset the two-dimensional sensor.

Title
Transmission-type electron microscope
Application Number
7/59501
Publication Number
4801801
Application Date
June 8, 1987
Publication Date
January 31, 1989
Inventor
Yoshiyasu Harada
Akishima
JP
Tetsuo Oikawa
Akishima
JP
Junji Miyahara
Kaiseimachi
JP
Nobufumi Mori
Kaiseimachi
JP
Agent
Webb Burden Ziesenheim & Webb
Assignee
JEOL
JP
Fuji Photo Film
JP
IPC
H01J 37/22
G01N 23/04
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