04788994 is referenced by 105 patents and cites 8 patents.

A wafer holding mechanism horizontally holds, one at a time, wafers which are sequentially transported thereto. Wafers are treated with liquids such as an etchant, rinsing liquid, and the like, at the same time that the wafer is rotated at a high speed. The mechanism includes a hollow rotary shaft having an upper end thrust into a housing, a rotary plate horizontally mounted on the upper end of the rotary shaft, chuck pieces provided on the rotary plate for holding an outer peripheral edge of the wafer, the chuck pieces being movable in the radial direction of the rotating plate between a holding position wherein the wafer is tightly held by the chuck pieces and a release position wherein the wafer is free to be removed from the chuck pieces.

Title
Wafer holding mechanism
Application Number
7/84336
Publication Number
4788994
Application Date
August 11, 1987
Publication Date
December 6, 1988
Inventor
Kaoru Shinbara
Kusatsu
JP
Agent
Ostrolenk Faber Gerb & Soffen
Assignee
Dainippon Screen Mfg Co
JP
IPC
B08B 3/00
B05C 11/00
C23F 1/02
View Original Source