04768064 is referenced by 5 patents and cites 8 patents.

A conveyor device for alignment in which minutely displaceable members and hydraulic fluid supply pads are disposed between a slide and a guide. The relative position of the slide and the guide is adjusted by controlling the dimension of the minutely displaceable members.

Title
Conveyor device for alignment
Application Number
627522
Publication Number
4768064
Application Date
December 28, 1987
Publication Date
August 30, 1988
Inventor
Takao Yokomatsu
Yokohama
JP
Mikio Nakasugi
Tokyo
JP
Junji Isohata
Tokyo
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaisha
JP
IPC
G03B 27/42
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