04747367 is referenced by 114 patents and cites 14 patents.

Apparatus for producing a constant flow, constant pressure chemical vapor deposition includes a manifold having inlet valves for simultaneously switching equal flows of reactive and nonreactive gas between a process chamber and a vent chamber. A constant flow through the process chamber during a deposition is maintained by replacing each reactive gas flow with the equal nonreactive gas flow. Substantially equal pressures within each chamber are maintained by the substantially equal flows of gases. Any "dead space" within the manifold downstream of the inlet valves is minimized by use of a radial manifold. The nonreactive gas flows also purge the "dead space" of reactive gas that may linger after its flow is switched to the vent chamber.

Title
Method and apparatus for producing a constant flow, constant pressure chemical vapor deposition
Application Number
6/873582
Publication Number
4747367
Application Date
June 12, 1986
Publication Date
May 31, 1988
Inventor
John G Posa
Lake Oswego
OR, US
Agent
Klarquist Sparkman Campbell Leigh & Whinston
Assignee
Crystal Specialties
OR, US
IPC
C23C 16/00
View Original Source