04710732 is referenced by 462 patents and cites 13 patents.

Spatial light modulators with deflectable metal flaps hinged to conducting posts on a substrate are disclosed. The metal flaps and conducting post may be a single piece, and connected to addressing circuitry in the substrate. Also, plasma etching to fabricate the flaps without breakage is disclosed.

Title
Spatial light modulator and method
Application Number
6/635966
Publication Number
4710732
Application Date
July 31, 1984
Publication Date
December 1, 1987
Inventor
Larry J Hornbeck
Van Alstyne
TX, US
Agent
Melvin Sharp
Leo N Heiting
Carlton H Hoel
Assignee
Texas Instruments Incorporated
TX, US
IPC
H04N 5/74
B44C 1/22
G02F 1/27
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