04682885 is referenced by 59 patents and cites 4 patents.

An illumination apparatus for illuminating, with a light beam of arcuate cross-section, a mask having an integrated-circuit pattern to transfer the integrated-circuit pattern onto a semiconductor wafer includes an illumination optical system having a light source, a plurality of cylindircal lenses and a collimator lens to illuminate, in the Kohler illumination manner, a rectangular region on a predetermined plane, a restricting member disposed in the predetermined plane to restrict the light beam incident on the predetermined plane so that a light beam of arcuate cross-section emerges from the predetermined plane, and an optical member for forming an image of the restricting member on the mask. With this arrangement, the pattern of the mask is transferred onto the wafer without any distortion.

Title
Illumination apparatus
Application Number
729056
Publication Number
4682885
Application Date
September 30, 1986
Publication Date
July 28, 1987
Inventor
Makoto Torigoe
Kawasaki
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaisha
JP
IPC
G03B 27/54
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