04676631 is referenced by 18 patents and cites 8 patents.

A device for adjusting projection magnification of a projection lens usable in a process of manufacture of semiconductor devices to project an image of a pattern of a reticle onto a semiconductor wafer. The device includes at least one plane glass plate to form a substantially closed space at the semiconductor wafer side of the projection lens system. Pressure in the space is controlled to control deformation of the glass plate to thereby adjust the projection magnification.

Title
Device for adjusting projection magnification
Application Number
6/868147
Publication Number
4676631
Application Date
May 29, 1986
Publication Date
June 30, 1987
Inventor
Ichiro Kano
Yokohama
JP
Masao Kosugi
Yokohama
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaisha
JP
IPC
G03B 27/52
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