04676404 is referenced by 50 patents and cites 14 patents.

An apparatus for feeding a variety of doping liquid used in doping-liquid treatment processes for electronic materials such as semiconductors and precision machinery components, and a feeding monitor apparatus. More specifically, it relates to an apparatus for stably feeding the doping liquid while detecting its volume, in the case where the doping liquid is fed from a liquid-filled hermetic returnable can to the doping liquid treatment process, and a feeding monitor apparatus is connected between the returnable can and treatment process.

Title
Method and apparatus for feeding drug liquid from hermetic returnable can
Application Number
6/660412
Publication Number
4676404
Application Date
October 12, 1984
Publication Date
June 30, 1987
Inventor
Katsuhiro Fujino
Yokohama
JP
Yoshiro Oka
Yokohama
JP
Shigemitsu Kamiya
Kawasaki
JP
Shigeru Iizuka
Yokohama
JP
Masahiro Yamazaki
Yokohama
JP
Agent
Weingarten Schurgin Gagnebin & Hayes
Assignee
Fujitsu
JP
Nippon Zeon
JP
IPC
B67D 5/00
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