04662746 is referenced by 482 patents and cites 6 patents.

An electrostatically deflectable beam spatial light modulator with the beam composed of two layers of aluminum alloy and the hinge connecting the beam to the remainder of the alloy formed in only one of the two layers; this provides a thick stiff beam and a thin compliant hinge. The alloy is on a spacer made of photoresist which in turn is on a semiconductor substrate. The substrate contains addressing circuitry in a preferred embodiment.

Title
Spatial light modulator and method
Application Number
6/792947
Publication Number
4662746
Application Date
October 30, 1985
Publication Date
May 5, 1987
Inventor
Larry J Hornbeck
Van Alstyne
TX, US
Agent
Melvin Sharp
Leo N Heiting
Carlton H Hoel
Assignee
Texas Instruments Incorporated
TX, US
IPC
H01S 3/00
G02B 00/00
G02B 26/02
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