04649261 is referenced by 114 patents and cites 19 patents.

An integrating light pipe, very preferably a kaleidoscope, encloses a source of radiant thermal energy, the light pipe and energy source being so arranged as to achieve efficient and substantially uniform heating of a workpiece in a target plane. The pipe has closed ends so as to heat the workpiece from both sides uniformly and efficiently. The apparatus employs CW lamps, pulsed lamps, and a combination of the two.

Title
Apparatus for heating semiconductor wafers in order to achieve annealing, silicide formation, reflow of glass passivation layers, etc.
Application Number
584322
Publication Number
4649261
Application Date
February 7, 1985
Publication Date
March 10, 1987
Inventor
Ronald E Sheets
Santa Ana
CA, US
Agent
Gausewitz Carr & Rothenberg
Assignee
Tamarack Scientific Co
CA, US
IPC
F27D 11/02
F27B 5/14
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