04634270 is referenced by 10 patents and cites 3 patents.

A protective cover for photoprinting system comprises a cover portion made of a transparent thin plate of inorganic material, an antireflection multiple coating provided on at least one of the inner and outer surfaces of the cover plate, and a spacer arranged on the peripheral portion of the cover plate for keeping the inner surface of the cover plate away from the surface to be protected, e.g., pattern surface of photomask and sealing the space between them.

Since the cover plate is made of inorganic material, the mechanical strength thereof is large. Since the cover plate is thin and the antireflection multiple coating is provided on the cover plate, absorption of light therein is little and confusion of the pattern image due to rays reflected by the boundaries of the cover plate is ignorable.

Title
Protective cover
Application Number
6/789071
Publication Number
4634270
Application Date
October 18, 1985
Publication Date
January 6, 1987
Inventor
Tsuyoshi Kaneda
Tokyo
JP
Masahiro Dan
Tokyo
JP
Soichi Torisawa
Tokyo
JP
Tadashi Shimomura
Tokyo
JP
Sadao Yokoo
Kanagawa
JP
Agent
Woodcock Washburn Kurtz Mackiewicz & Norris
Assignee
Hitachi Microcomputer Engineering
JP
Hitachi
JP
Nippon Sheet Glass
JP
IPC
G03B 27/52
G03B 27/28
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