04598197 is referenced by 20 patents and cites 7 patents.

A projection aligner wherein light from a light source is passed through a mask so as to focus an image of a pattern of the mask on a wafer, characterized in that at least one sensor for monitoring a luminosity and a distribution thereof is disposed in an optical path between the light source and the mask, whereby a luminosity and a distribution thereof on the wafer can be controlled to proper values. The projection aligner is effective for application to minute processing technologies for the production of semiconductor devices, etc.

Title
Projection aligner
Application Number
6/519675
Publication Number
4598197
Application Date
August 2, 1983
Publication Date
July 1, 1986
Inventor
Terushige Asakawa
Koganei
JP
Yoichiro Tamiya
Higashimurayama
JP
Tai Hoshi
Koganei
JP
Hiroshi Nishizuka
Higashikurume
JP
Keizo Nomura
Higashiyamato
JP
Koyo Morita
Higashimurayama
JP
Agent
Antonelli Terry & Wands
Assignee
Hitachi Ome Electronic
JP
Hitachi
JP
IPC
G03B 27/80
G03B 27/74
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