04595498 is referenced by 49 patents and cites 9 patents.

A water purification system includes an ion-exchange unit for producing high-resistivity water, followed by ozone exposure and ultraviolet sterilizer units that oxidize organics and also reduce resistivity, followed by a vacuum degassification unit to restore high resistivity.

Title
Water-polishing loop
Application Number
6/686861
Publication Number
4595498
Application Date
December 27, 1984
Publication Date
June 17, 1986
Inventor
Wilford H Gopffarth
Fort Worth
TX, US
Joel W Browning
Flower Mound
TX, US
Judith S Cohen
Dallas
TX, US
Assignee
Thomson Components Mostek Corporation
TX, US
IPC
B01D 15/04
B01D 13/00
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