04592306 is referenced by 163 patents and cites 9 patents.

Compact and versatile apparatus for deposition of multi-layer coatings on substrates at reduced pressure comprises at least 3 and preferably at least 4 evacuable deposition chambers, means for evacuating each of said deposition chambers and coating means in each of said deposition chambers for depositing a coating layer on a substrate; an evacuable transfer chamber with closable ports between said transfer chamber and each of said coating chambers for transfer of a substrate to be coated between said deposition chambers; means for evacuating said transfer chamber; and transfer means for transferring a substrate between said deposition chambers via the transfer chamber. The apparatus is especially useful for the production of photovoltaic cells in which the active layers are formed of amorphous silicon deposited from a glow discharge.

Title
Apparatus for the deposition of multi-layer coatings
Application Number
6/676977
Publication Number
4592306
Application Date
November 30, 1984
Publication Date
June 3, 1986
Inventor
Jose M Gallego
Ormskirk
GB
Agent
Sughrue Mion Zinn Macpeak & Seas
Assignee
Pilkington Brothers
GB
IPC
C23C 16/50
C23C 14/56
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