04590042 is referenced by 185 patents and cites 5 patents.

A plasma reactor apparatus is disclosed in which plates having channels are used to redistribute gas uniformly over the surface of a wafer being processed in the reactor. Slot means adjacent the plates provide a final baffle to prevent jetstreams in the gas from impinging directly on the wafer.

Title
Plasma reactor having slotted manifold
Application Number
6/685650
Publication Number
4590042
Application Date
December 24, 1984
Publication Date
May 20, 1986
Inventor
David J Drage
Sebastopol
CA, US
Agent
Paul F Wille
Assignee
Tegal Corporation
CA, US
IPC
C23F 1/02
C23C 14/00
B01J 19/08
View Original Source