04579623 is referenced by 136 patents and cites 2 patents.

A gas is introduced into a vacuum chamber after the vacuum chamber is evacuated, and a plasma is generated within at least part of the vacuum chamber. The specimen surface is exposed to the plasma so that the surface is treated. A plurality of different gases, such as SF.sub.6, N.sub.2, and the like, are used as the gas being introduced. The quantity of the gas is changed during the surface treatment. A controller is used as a mechanism for changing the quantity of gas introduced. The controller is operated in accordance with a predetermined program, or by signals obtained by detecting the surface conditions of the specimen during the surface treatment.

Title
Method and apparatus for surface treatment by plasma
Application Number
6/642801
Publication Number
4579623
Application Date
August 21, 1984
Publication Date
April 1, 1986
Inventor
Osami Okada
Chofu
JP
Sadayuki Okudaira
Ohme
JP
Shigeru Nishimatsu
Kokubunji
JP
Ken Ninomiya
Nakano
JP
Keizo Suzuki
Arlington
MA, US
Agent
Antonelli Terry & Wands
Assignee
Hitachi
JP
IPC
B44C 1/22
B05D 3/06
B05B 5/02
H01L 21/306
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