04536884 is referenced by 59 patents and cites 7 patents.

A system is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma is repeatably generated in a first area directly from solid material without exploding the latter. X-rays are generated in a second area by passing high current through the plasma causing radial inward magnetic field pinching. Accurate control and improved intensity performance, and greater flexibility in selection of X-ray emitting materials, are provided by the separation of the plasma generating and the X-ray pinch generating functions. Common electrode structure is provided for plasma generating and for plasma pinching, which common electrode also provides a cylindrical plasma communication passage from the first to the second area, and provides an X-ray emission passage of desired axial orientation.

Title
Plasma pinch X-ray apparatus
Application Number
6/420558
Publication Number
4536884
Application Date
September 20, 1982
Publication Date
August 20, 1985
Inventor
Peter H Wackman deceased
late of Wauwatosa
WI, US
Stanley V Jaskolski
Sussex
WI, US
Gordon B Spellman
Mequon
WI, US
Louis Cartz
Milwaukee
WI, US
Herman P Schutten
Milwaukee
WI, US
Arnold Weiss
Minneapolis
MN, US
Agent
L G Vande Zande
C H Grace
Assignee
Eaton Corporation
OH, US
IPC
H05B 31/22
H01J 35/00
View Original Source