04508054 is referenced by 34 patents and cites 7 patents.

Reactive gases providing a coating on a substrate by CVD are made to meet in counterflow, in order to ensure, by the turbulence effect, that there is an almost instantaneous mixing of the reagents. The movement of the gases before contact is ensured by two pipes containing baffles, the effect of which is to cause the gases to rotate in opposite directions to one another.

Title
Device for depositing a mineral oxide coating on a substrate
Application Number
440225
Publication Number
4508054
Application Date
December 21, 1983
Publication Date
April 2, 1985
Inventor
Reinhard Kalbskopf
Vordenwald
CH
Otto Baumberger
Carouge
CH
Agent
Herbert Dubno
Karl F Ross
Assignee
Battelle Memorial Institute
CH
IPC
C23C 13/10
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