04497013 is referenced by 36 patents and cites 1 patents.

An illuminating apparatus is provided with an illuminating unit for forming a plurality of secondary light sources, the illuminating unit having a light source, a light converging device for converging photoenergy emitted from the light source, and a first multi-beam forming optical element for forming multiple light beams. A second multi-beam forming optical element produces a uniform luminance distribution and forms multiple light beams. A first converging optical system converges the photoenergy emitted from the first multi-beam forming optical element on the second multi-beam forming optical element, and a second converging optical system converges the photoenergy emitted from the second multi-beam forming optical element on a photomask.

Title
Illuminating apparatus
Application Number
6/508333
Publication Number
4497013
Application Date
June 27, 1983
Publication Date
January 29, 1985
Inventor
Masakatu Ohta
Tokyo
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaisha
JP
IPC
F21V 7/04
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