04417948 is referenced by 70 patents and cites 6 patents.

A technique is described for photoetching polyesters, such as polyethylene teraphthalate (PET), efficiently, and without causing degradation or heating of the bulk of the PET material. At least about 1000.ANG. of the polyester are removed by application of ultraviolet radiation having wavelengths less than 220 nm. To enhance the process, irradiation can occur in the presence of oxygen or air.

Title
Self developing, photoetching of polyesters by far UV radiation
Application Number
6/396985
Publication Number
4417948
Application Date
July 9, 1982
Publication Date
November 29, 1983
Inventor
Rangaswamy Srinivasan
Ossining
NY, US
Veronica I Mayne Banton
Ossining
NY, US
Agent
Jackson E Stanland
Assignee
International Business Machines Corporation
NY, US
IPC
C03C 25/06
C03C 15/00
B44C 1/22
View Original Source