04392362 is referenced by 110 patents and cites 3 patents.

A microminiature cryogenic device for cooling in the milliwatt range includes a miniature refrigerator in which micron-sized fluid passages are defined in one or more internal surfaces of a laminate of glass or similar low thermal conductivity members by means of lithographic, etching or particle blasting techniques.

Title
Micro miniature refrigerators
Application Number
23245
Publication Number
4392362
Application Date
May 1, 1981
Publication Date
July 12, 1983
Inventor
William A Little
Palo Alto
CA, US
Agent
LeBlanc Nolan Shur & Nies
Assignee
The Board of Trustees of the Leland Stanford Junior University
CA, US
IPC
F25B 19/00
View Original Source