04389973 is referenced by 363 patents and cites 6 patents.

A method and an apparatus are provided for performing growth of compound thin films by alternately repeating separate surface reactions of the substances comprising the compound. A carrier gas affects a diffusion barrier between the surface reaction steps to be separated from each other. The gas phase diffusion barrier is also applied to separate the source regions of different reacting vapors both from each other and from the surface reaction zone.

Title
Apparatus for performing growth of compound thin films
Application Number
50606
Publication Number
4389973
Application Date
December 11, 1981
Publication Date
June 28, 1983
Inventor
Sven G Lindfors
Espoo
FI
Arto J Pakkala
Espoo
FI
Tuomo S Suntola
Espoo
FI
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Oy Lohja
FI
IPC
C23C 13/08
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