04325984 is referenced by 27 patents and cites 1 patents.

A method for preventing the post-etch corrosion of aluminum or aluminum alloy film which has been etched utilizing chlorinated plasma wherein the etched film is exposed to fluorinated plasma.

Title
Plasma passivation technique for the prevention of post-etch corrosion of plasma-etched aluminum films
Application Number
6/172745
Publication Number
4325984
Application Date
July 28, 1980
Publication Date
April 20, 1982
Inventor
Ashok L Nalamwar
Milpitas
CA, US
Christopher H Galfo
San Jose
CA, US
Agent
Michael J Pollock
Theodore Scott Park
Paul J Winters
Assignee
Fairchild Camera & Instrument
CA, US
IPC
B05D 3/06
B05D 3/04
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