04162908 is referenced by 27 patents and cites 8 patents.

An improvement in a method for producing a synthetic hydroxyl ion-free quartz glass wherein a hydrogen free silicon compound is heated in a hydrogen-free gas stream while the gas stream is passed through an induction coupled plasma burner, the gas stream containing elemental and/or bound oxygen and the oxidation product is deposited on a refractory support as a vitreous mass, the improvement lying in including in the gas stream a gaseous hydrogen-free, thermally decomposable compound which yields fluorine in an amount of at least 500 gms. per kilogram of silica to be produced; an apparatus for producing a synthetic OH ion-free quartz glass comprising an induction coupled plasma burner which burner has disposed thereabout 3 concentric quartz glass tubes disposed in stepped configuration of which the outermost tube is the longest and the innermost tube is the shortest. The apparatus includes means for passing through the innermost tube a hydrogen-free gas stream containing elemental oxygen and/or bound oxygen together with a gaseous hydrogen free thermally decomposable compound which yields fluorine. The apparatus further contains means for passing a separating gas such as oxygen through the space defined by the innermost tube and the middle tube and the middle tube and the outermost tube.

Title
Method of producing synthetic quartz glass, apparatus for the practice of the method, and use of the synthetic quartz glass
Application Number
713541
Publication Number
4162908
Application Date
February 3, 1978
Publication Date
July 31, 1979
Inventor
Norbert Treber
Kriftel
DE
Albert Muhlich
Frankfurt
DE
Fritz Simmat
Gelnhausen
DE
Karlheinz Rau
Hanau
DE
Agent
Sprung Felfe Horn Lynch & Kramer
Assignee
Heraeus Quarzschmelze
DE
IPC
C03C 25/02
C03C 17/02
C03C 17/00
View Original Source