04151008 is referenced by 118 patents and cites 7 patents.

A pulsed laser or flash lamp produces a short duration pulse of light for thermal processing of selected regions of a semiconductor device. The light pulse is directed towards the semiconductor device and irradiates selected surface regions of the device to be processed. Energy deposited by the light pulse momentarily elevates the temperature of the selected regions above threshold processing temperatures for rapid, effective annealing, sintering or other thermal processing. The characteristics of the light pulse are such that only those surface vicinity regions to be processed are elevated to a high temperature and the remaining mass of the semiconductor device is not subjected to unnecessary or undesirable high temperature exposure.

Title
Method involving pulsed light processing of semiconductor devices
Application Number
524062
Publication Number
4151008
Application Date
March 23, 1977
Publication Date
April 24, 1979
Inventor
Allen R Kirkpatrick
Lowell
MA, US
Agent
Morse Altman Oates & Bello
Assignee
Spire Corporation
MA, US
IPC
H01L 21/26
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