04128752 is referenced by 41 patents and cites 4 patents.

Laser micromachining apparatus for producing a selectable machining pattern on a workpiece, for example a substrate of paper or rubber or for producing a silicon integrated circuit. A high power laser beam carrying a controllable sequence of light pulses passes through a variable attenuator unit and then through a beam expander unit before impinging on a mask containing an enlarged pattern of the mark to be machined. The pattern in the mask consists of a suitable arrangement of small apertures. After diffraction through these apertures and focalization by a converging optical element, the laser light passes through an optical imaging unit which images the mask onto the workpiece to produce said selectable machining pattern thereon.

Title
Laser micromachining apparatus
Application Number
5/750898
Publication Number
4128752
Application Date
December 15, 1976
Publication Date
December 5, 1978
Inventor
Joseph A M Gravel
Quebec
CA
Agent
Edward Goldberg
Sheldon Kanars
Nathan Edelberg
Assignee
Her Majesty the Queen in right of Canada represented by the Minister of National Defence
CA
IPC
B23K 9/00
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