04037969 is referenced by 82 patents and cites 4 patents.

Certain classes of patterns, for example so-called zone plates, are utilized as alignment marks in the fabrication of integrated circuits. Such a plate, which functions as a lens, provides a high-brightness image that is relatively insensitive to any degradation of the pattern.

Title
Zone plate alignment marks
Application Number
5/673126
Publication Number
4037969
Application Date
April 2, 1976
Publication Date
July 26, 1977
Inventor
Alan David White
Berkeley Heights
NJ, US
Martin Feldman
Murray Hill
NJ, US
Agent
Lucian C Canepa
Assignee
Bell Telephone Laboratories Incorporated
NJ, US
IPC
G01B 11/26
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