04034130 is referenced by 3 patents and cites 4 patents.

The method of producing pyrolytic SiO.sub.2 on the surface of a substrate comprises mixing SiH.sub.4 and NOCl in an atmosphere of carrier gas, and passing the gas mixture over the heated substrate. With this process, precipitation of SiO.sub.2 on the walls of the reaction chamber is avoided.

Title
Method of growing pyrolytic silicon dioxide layers
Application Number
5/615258
Publication Number
4034130
Application Date
September 22, 1975
Publication Date
July 5, 1977
Inventor
Ewald Eisenbraun
Boblingen
DT
Marian Briska
Boblingen
DT
Agent
George O Saile
Assignee
International Business Machines Corporation
NY, US
IPC
C23C 11/00
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